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	<title>Emerging Nanopatterning Methods &#187; development</title>
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		<title>Lithography Nanopatterning &#8211; Lithography</title>
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		<pubDate>Mon, 06 Sep 2010 19:56:17 +0000</pubDate>
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		<guid isPermaLink="false">http://www.napaip.org/?p=111</guid>
		<description><![CDATA[Lithography A typical integrated circuit consists of various patterned thin films of metals, dielectrics and semiconductors on various substrates such as silicon, gallium arsenide, or germanium. Such a device is fabricated by a technology known as lithography, in which radiation sensitive polymeric materials called resists are used to produce circuit patterns in the substrates. Figure <a href='http://www.napaip.org/lithography-nanopatterning-1/'>[...]</a>]]></description>
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