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	<title>Emerging Nanopatterning Methods &#187; way</title>
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		<title>Integration of Nanomechanical Sensors on CMOS by Nanopatterning Methods</title>
		<link>http://www.napaip.org/integration-of-nanomechanical-sensors-on-cmos-by-nanopatterning-methods/</link>
		<comments>http://www.napaip.org/integration-of-nanomechanical-sensors-on-cmos-by-nanopatterning-methods/#comments</comments>
		<pubDate>Mon, 06 Sep 2010 19:11:23 +0000</pubDate>
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				<category><![CDATA[Nanopatterning]]></category>
		<category><![CDATA[Air]]></category>
		<category><![CDATA[ambient]]></category>
		<category><![CDATA[amplifier]]></category>
		<category><![CDATA[approach]]></category>
		<category><![CDATA[architecture]]></category>
		<category><![CDATA[behavior]]></category>
		<category><![CDATA[Cantilevers]]></category>
		<category><![CDATA[chemical]]></category>
		<category><![CDATA[circuit]]></category>
		<category><![CDATA[circuitry]]></category>
		<category><![CDATA[CMOS]]></category>
		<category><![CDATA[cmos devices]]></category>
		<category><![CDATA[cmos technology]]></category>
		<category><![CDATA[CNM]]></category>
		<category><![CDATA[compatibility]]></category>
		<category><![CDATA[conditioning]]></category>
		<category><![CDATA[conveyor]]></category>
		<category><![CDATA[degrade]]></category>
		<category><![CDATA[deposition]]></category>
		<category><![CDATA[detection]]></category>
		<category><![CDATA[detection scheme]]></category>
		<category><![CDATA[device]]></category>
		<category><![CDATA[driving]]></category>
		<category><![CDATA[electrical behavior]]></category>
		<category><![CDATA[electrical response]]></category>
		<category><![CDATA[electron]]></category>
		<category><![CDATA[estimation]]></category>
		<category><![CDATA[experiment]]></category>
		<category><![CDATA[fabrication]]></category>
		<category><![CDATA[fact]]></category>
		<category><![CDATA[feasibility]]></category>
		<category><![CDATA[femtoliter]]></category>
		<category><![CDATA[frequency]]></category>
		<category><![CDATA[function]]></category>
		<category><![CDATA[generation]]></category>
		<category><![CDATA[industry]]></category>
		<category><![CDATA[instrumentation]]></category>
		<category><![CDATA[integration]]></category>
		<category><![CDATA[issue]]></category>
		<category><![CDATA[layout]]></category>
		<category><![CDATA[lithography]]></category>
		<category><![CDATA[magnitude]]></category>
		<category><![CDATA[mass]]></category>
		<category><![CDATA[matter]]></category>
		<category><![CDATA[measurement]]></category>
		<category><![CDATA[measurement instrumentation]]></category>
		<category><![CDATA[Methods]]></category>
		<category><![CDATA[microcantilever]]></category>
		<category><![CDATA[monolithic integration]]></category>
		<category><![CDATA[N-MEMS]]></category>
		<category><![CDATA[Nano]]></category>
		<category><![CDATA[nanolithography]]></category>
		<category><![CDATA[Nanomechanical]]></category>
		<category><![CDATA[nanostencil]]></category>
		<category><![CDATA[NEMS]]></category>
		<category><![CDATA[NEMS-based]]></category>
		<category><![CDATA[nSL]]></category>
		<category><![CDATA[output]]></category>
		<category><![CDATA[output signal]]></category>
		<category><![CDATA[parallel]]></category>
		<category><![CDATA[parasitic capacitances]]></category>
		<category><![CDATA[part]]></category>
		<category><![CDATA[pattern]]></category>
		<category><![CDATA[performance]]></category>
		<category><![CDATA[physical]]></category>
		<category><![CDATA[positioning]]></category>
		<category><![CDATA[possibility]]></category>
		<category><![CDATA[potential]]></category>
		<category><![CDATA[power cmos]]></category>
		<category><![CDATA[process]]></category>
		<category><![CDATA[processing]]></category>
		<category><![CDATA[promising systems]]></category>
		<category><![CDATA[QCM]]></category>
		<category><![CDATA[quality]]></category>
		<category><![CDATA[quartz]]></category>
		<category><![CDATA[range]]></category>
		<category><![CDATA[readout]]></category>
		<category><![CDATA[regard]]></category>
		<category><![CDATA[resolution]]></category>
		<category><![CDATA[resonance]]></category>
		<category><![CDATA[resonator]]></category>
		<category><![CDATA[response]]></category>
		<category><![CDATA[scale]]></category>
		<category><![CDATA[scheme]]></category>
		<category><![CDATA[semiconductor]]></category>
		<category><![CDATA[sense]]></category>
		<category><![CDATA[sensitivity]]></category>
		<category><![CDATA[Sensors]]></category>
		<category><![CDATA[sessile]]></category>
		<category><![CDATA[signal]]></category>
		<category><![CDATA[signal levels]]></category>
		<category><![CDATA[silicon]]></category>
		<category><![CDATA[Simulation]]></category>
		<category><![CDATA[simulation results]]></category>
		<category><![CDATA[size]]></category>
		<category><![CDATA[spatial]]></category>
		<category><![CDATA[strai]]></category>
		<category><![CDATA[strategy]]></category>
		<category><![CDATA[stray capacitances]]></category>
		<category><![CDATA[technique]]></category>
		<category><![CDATA[technology]]></category>
		<category><![CDATA[time]]></category>
		<category><![CDATA[tool]]></category>
		<category><![CDATA[topology]]></category>
		<category><![CDATA[transduction]]></category>
		<category><![CDATA[transimpedance]]></category>
		<category><![CDATA[transimpedance amplifier]]></category>
		<category><![CDATA[uncertainty]]></category>
		<category><![CDATA[uniform]]></category>
		<category><![CDATA[vacuum]]></category>
		<category><![CDATA[versatility]]></category>
		<category><![CDATA[voltage]]></category>
		<category><![CDATA[wafer]]></category>
		<category><![CDATA[way]]></category>

		<guid isPermaLink="false">http://www.napaip.org/?p=97</guid>
		<description><![CDATA[First, the mechanical and electrical behavior of electrostatically actuated nano/microresonators (cantilevers, bridges and quad-beams) embedded in a capacitive detection scheme have been analyzed. In such a scheme, the main issue comes from parasitic stray capacitances that can drastically degrade the performance of the transduction. Additionally, output parasitic capacitances arising from the measurement instrumentation can further <a href='http://www.napaip.org/integration-of-nanomechanical-sensors-on-cmos-by-nanopatterning-methods/'>[...]</a>]]></description>
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